Micro-bridge Mass Airflow Sensors AWM Series

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All airflow sensors operate on heat transfer — flow and differential pressure. Silicon chip design is created from thin-film, thermally isolated bridge structure, containing both heater and temperature sensing elements. This provides rapid response to the air or gas flow and amount and direction, delivering a proportional output voltage. Amplified versions provide an enhanced output signal and less external circuitry, while unamplified versions allow additional external circuit options. Contains thin-film thermally isolated bridge with heater and temperature sensing elements. Bridge promotes sensitivity and fast response to flow.


  • Precision silicon micromachining
  • Sensitive to low flows – 0.1 sccm to 200 SLPM
  • Enhanced response time
  • Analog output
  • Low power consumption
  • Cost Effective
  • Sensor to sensor interchangeability
  • Mass flow and pressure / differential pressure sensing
  • Amplified and unamplified versions available
  • Laser-trimmed interchangeability


  • Damper control for heating, ventilation, and air conditioning systems
  • Gas analyzers
  • Low vacuum control
  • Process control
  • Medical respirators and ventilators
  • Oxygen concentrators
  • Leak detection equipment
  • Vent hoods
  • Anesthesia control
  • Gas metering
  • Gas chromatography