Digital Differential Pressure Type MEMS Mass Flow Sensor | Omron

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D6F-PH Buy Now

The Differential Pressure Type MEMs Flow Sensor with an I2C output uses the proprietary Omron mass flow MEMs chip, however, the internal flow path has been redesigned to produce a low flow, high velocity/high impedance sensor that will output a differential pressure. The sensor can be calibrated for different gases.

When used in a bypass type design (or set-up similar to a differential pressure sensor), this product is not sensitive to variations in the bypass tube length. The D6F-PH is targeted for, but not limited to, the HVAC/VAV market as tubing in HVAC damper controls is often installed in the field which makes it a challenge to maintain consistent tube lengths.


  • High accuracy of +/- 3% R.D.
  • Linearized and temperature compensated
  • Digital output (I2C communication)
  • High flow impedance to reduce the influence of bypass configuration